This course provides a comprehensive theoretical framework encompassing the entire scientific spectrum from functional materials to device integration.
It introduces the fundamental principles of thin film deposition, including physical and chemical methods, and discusses how process parameters affect microstructure and functional properties.
It particularly emphasizes functional oxide thin films, such as ferroelectric and piezoelectric materials, relevant to sensing and actuator applications.
The course also covers advanced characterization techniques used to study structural, electrical, and electromechanical properties at the micro and nanoscale levels. Finally, the course addresses the theoretical foundations of micro and nanofabrication processes, and how functional thin films are integrated into devices such as capacitors, sensors, and actuators.


